US 12,449,313 B2
Microbolometer having reduced pixel pitch
Nicolas Boudou, Grenoble (FR)
Assigned to LYNRED, Palaiseau (FR)
Appl. No. 17/614,830
Filed by LYNRED, Palaiseau (FR)
PCT Filed Jun. 5, 2020, PCT No. PCT/EP2020/065677
§ 371(c)(1), (2) Date Nov. 29, 2021,
PCT Pub. No. WO2020/245394, PCT Pub. Date Dec. 10, 2020.
Claims priority of application No. 1905962 (FR), filed on Jun. 5, 2019.
Prior Publication US 2022/0236114 A1, Jul. 28, 2022
Int. Cl. G01J 5/20 (2006.01); G01J 5/00 (2022.01); G01J 5/08 (2022.01); G01J 5/0802 (2022.01)
CPC G01J 5/20 (2013.01) [G01J 5/0802 (2022.01); G01J 5/0853 (2013.01); G01J 2005/0077 (2013.01); G01J 2005/202 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A microbolometer comprising an array of pixels, each pixel comprising one or more detection cells, each detection cell comprising an absorption layer, wherein:
the pitch of the detection cells in at least one direction in the plane of pixel array is between 5 and 11 μm;
a pixel fill factor FF of the absorption layer of the one or more detection cells in each pixel is in a range 0.10 to 0.50; and
a sheet resistance Rs of the absorption layer of each detection cell is between 20 and 189 ohm/sq, and a ratio Rs/FF of each pixel of the array is between 200 and 600 ohm/sq.