US 12,449,251 B2
Method of measuring thickness of display device
Sang Heon Ye, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Jun. 19, 2023, as Appl. No. 18/211,456.
Claims priority of application No. 10-2022-0107783 (KR), filed on Aug. 26, 2022.
Prior Publication US 2024/0068800 A1, Feb. 29, 2024
Int. Cl. G01B 11/06 (2006.01); G06V 40/13 (2022.01)
CPC G01B 11/0633 (2013.01) [G06V 40/1318 (2022.01); G01B 2210/58 (2013.01); G06V 2201/07 (2022.01)] 18 Claims
OG exemplary drawing
 
1. A method of measuring a thickness of a display device, comprising:
acquiring a sensing value by scanning external light to a photo sensing pixel of the display device; and
measuring an organic layer thickness at a tag part of the display device and comparing the measured thickness with the sensing value, wherein the measuring of the organic layer thickness at the tag part of the display device is made using an In Chamber Ellipsometer (ICE),
wherein the display device includes a light emission pixel and a photo sensing pixel,
wherein the photo sensing pixel includes a photo sensing element and a transparent layer positioned on the photo sensing element,
wherein the transparent layer amplifies light incident to the photo sensing pixel by resonance, and
wherein the sensing value is highest when a deposition thickness of the transparent layer matches a target thickness, and the sensing value decreases as the deposition thickness of the transparent layer is farther from the target thickness.