US 12,449,065 B2
Pressure control valve
Toshikazu Ogisu, Komaki (JP)
Assigned to CKD CORPORATION, Komaki (JP)
Appl. No. 18/683,450
Filed by CKD CORPORATION, Komaki (JP)
PCT Filed Dec. 14, 2022, PCT No. PCT/JP2022/046060
§ 371(c)(1), (2) Date Feb. 13, 2024,
PCT Pub. No. WO2023/171071, PCT Pub. Date Sep. 14, 2023.
Claims priority of application No. 2022-035237 (JP), filed on Mar. 8, 2022.
Prior Publication US 2024/0344633 A1, Oct. 17, 2024
Int. Cl. F16K 51/02 (2006.01); F16K 49/00 (2006.01)
CPC F16K 51/02 (2013.01) [F16K 49/00 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A pressure control valve configured to open and close an opening portion of a circular shape, the opening portion connecting a vacuum chamber used for a semiconductor manufacturing apparatus and an exhaust pump for evacuating the vacuum chamber, wherein
the pressure control valve comprises a valve unit to be brought into or out of contact with a valve seat provided outward in a radial direction of the opening portion,
the valve unit includes:
a hollow portion positioned between an upper surface of the valve unit on a side of the vacuum chamber and a lower surface of the valve unit on a side of the exhaust pump;
a first planar heater covering a first rear-side face of the upper surface in the hollow portion; and
a second planar heater covering a second rear-side face of the lower surface in the hollow portion,
the valve unit includes an annular sealing portion to be brought into or out of contact with the valve seat,
the hollow portion is positioned on an inner circumferential side in a radial direction of the annular sealing portion, and
a diameter of the hollow portion is smaller than a diameter of the annular sealing portion.