US 12,448,976 B2
Vacuum pump and control apparatus of vacuum pump with water leakage prevention between the pump main body and control apparatus
Kengo Saegusa, Chiba (JP)
Assigned to Edwards Japan Limited, Chiba (JP)
Appl. No. 17/441,555
Filed by Edwards Japan Limited, Chiba (JP)
PCT Filed Mar. 13, 2020, PCT No. PCT/JP2020/011073
§ 371(c)(1), (2) Date Sep. 21, 2021,
PCT Pub. No. WO2020/195944, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 2019-063520 (JP), filed on Mar. 28, 2019.
Prior Publication US 2022/0170470 A1, Jun. 2, 2022
Int. Cl. F04D 19/04 (2006.01); F04D 25/06 (2006.01); F04D 29/52 (2006.01); F04D 29/70 (2006.01)
CPC F04D 19/042 (2013.01) [F04D 25/068 (2013.01); F04D 25/0693 (2013.01); F04D 29/522 (2013.01); F04D 29/70 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A vacuum pump in which a pump main body and a control apparatus that controls the pump main body are integrated with each other, wherein
the pump main body includes a hermetic connector having a plurality of pins,
a relay substrate is connected to the plurality of pins,
the relay substrate is connected to the control apparatus by a cable,
the control apparatus includes a cylindrical portion which protrudes from a chassis of the control apparatus through a hole in a bottom portion of the pump main body wherein the cable passes from the control apparatus into both the cylindrical portion and the hole, and wherein the hermetic connector is above an entirety of the cylindrical portion and the cable is loose of the cylindrical portion,
a height of the cylindrical portion exceeds a height of a gap formed between the bottom portion of the pump main body and the chassis of the control apparatus, and
the cylindrical portion comprises a hollow plate-like portion configured to prevent water droplets from infiltrating into the control apparatus.