US 12,448,963 B2
Asymmetric gas bearing bushing for thermo-pump
Anatoly Shchemelinin, Bozeman, MT (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Jan. 23, 2024, as Appl. No. 18/420,359.
Claims priority of provisional application 63/457,104, filed on Apr. 4, 2023.
Prior Publication US 2024/0337259 A1, Oct. 10, 2024
Int. Cl. F04B 53/00 (2006.01); B23P 15/10 (2006.01); F02G 1/043 (2006.01); F02G 1/053 (2006.01); F04B 39/12 (2006.01); F16C 29/02 (2006.01); F16C 32/06 (2006.01)
CPC F04B 53/008 (2013.01) [B23P 15/10 (2013.01); F02G 1/0435 (2013.01); F02G 1/0535 (2013.01); F04B 39/126 (2013.01); F16C 29/025 (2013.01); F16C 32/0614 (2013.01); F05C 2251/042 (2013.01)] 31 Claims
OG exemplary drawing
 
1. A gas bearing comprising:
a cylinder with an inner cylinder radius;
a piston with a piston radius, wherein the inner cylinder radius is larger than the piston radius, wherein the piston is located within the cylinder;
a gas bearing radius, wherein the gas bearing radius is greater than the piston radius and less than the inner cylinder radius;
wherein a gap exists between the cylinder and the piston, wherein the gap contains a pressurized gas, the pressurized gas configured to prevent contact between the cylinder and the piston; and
a preloaded gas bearing interface to form an asymmetric gap between the cylinder and the piston, wherein the preloaded gas bearing interface is positioned to control a size of the gap,
wherein the preloaded gas bearing interface is positioned at a predetermined location along a section of the piston where the gap is smallest.