US 12,448,677 B2
Mask assembly and method for manufacturing of the same
Se Il Kim, Hwaseong-si (KR); Sang Min Yi, Suwon-si (KR); Eui Gyu Kim, Suwon-si (KR); and Dae Won Baek, Cheonan-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Mar. 29, 2023, as Appl. No. 18/192,468.
Application 18/192,468 is a division of application No. 16/988,954, filed on Aug. 10, 2020, abandoned.
Claims priority of application No. 10-2020-0014916 (KR), filed on Feb. 7, 2020.
Prior Publication US 2023/0240124 A1, Jul. 27, 2023
Int. Cl. C23C 14/04 (2006.01); C23C 14/24 (2006.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/24 (2013.01); H10K 71/00 (2023.02); H10K 71/164 (2023.02); H10K 71/166 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A mask assembly comprising:
a mask frame comprising a first mask opening and a second mask opening which are located side by side in a second direction and defined by a support bar extending in a first direction, the second direction intersecting the first direction;
a first split mask overlapping the first mask opening; and
a second split mask overlapping the second mask opening,
wherein the first split mask comprises a first half-etched portion at an end of first and second ends of the first split mask, the first half-etched portion comprising a groove at a lower side of the first split mask that is above and directly facing the support bar and extending-from an edge of the first split mask toward a center thereof, and the second split mask comprises a second half-etched portion at an end of first and second ends of the second split mask, the second half-etched portion comprising a groove at a lower side of the first split mask that is above and directly facing the support bar and extending from an edge of the second split mask toward a center thereof, and wherein the first half-etched portion and the second half-etched portion are located side by side in the second direction.