US 12,448,567 B2
Method for removing metal compound
Kazuma Matsui, Tokyo (JP)
Assigned to Resonac Corporation, Tokyo (JP)
Appl. No. 17/611,607
Filed by SHOWA DENKO K.K., Tokyo (JP)
PCT Filed Jan. 12, 2021, PCT No. PCT/JP2021/000714
§ 371(c)(1), (2) Date Nov. 16, 2021,
PCT Pub. No. WO2021/153220, PCT Pub. Date Aug. 5, 2021.
Claims priority of application No. 2020-013875 (JP), filed on Jan. 30, 2020.
Prior Publication US 2022/0243128 A1, Aug. 4, 2022
Int. Cl. C09K 13/00 (2006.01); B08B 3/08 (2006.01)
CPC C09K 13/00 (2013.01) [B08B 3/08 (2013.01)] 17 Claims
 
1. A method for removing a metal compound, comprising bringing at least one metal compound selected from oxides of a metal, nitrides of a metal, and oxynitrides of a metal into contact with a treatment liquid to remove the metal compound from a treatment object, wherein:
the metal is at least one selected from tungsten, cobalt, nickel, tantalum, titanium, iron, and molybdenum,
the treatment liquid is an aqueous solution consisting of water and at least one compound for removal selected from carboxylic acids and salts of the carboxylic acids, and
the treatment liquid contains the at least one compound for removal at a total concentration of 2 mass % or more.