US 12,448,281 B2
Micromechanical sensor structure with damping structure
Jochen Reinmuth, Reutlingen (DE); and Monika Koster, Reutlingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 18/044,252
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Nov. 29, 2021, PCT No. PCT/EP2021/083326
§ 371(c)(1), (2) Date Mar. 7, 2023,
PCT Pub. No. WO2022/117494, PCT Pub. Date Jun. 9, 2022.
Claims priority of application No. 10 2020 215 238.1 (DE), filed on Dec. 2, 2020.
Prior Publication US 2023/0331544 A1, Oct. 19, 2023
Int. Cl. G01P 15/08 (2006.01); B81B 7/00 (2006.01); G01P 3/44 (2006.01)
CPC B81B 7/0016 (2013.01) [G01P 3/44 (2013.01); G01P 15/08 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0882 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A micromechanical sensor structure, comprising:
a substrate;
a mass can be elastically deflected relative to the substrate;
a measuring unit configured to detecting a deflection of the mass; and
a damping structure configured to damp the deflection of the mass, the damping structure including first and second damping combs which mesh together, wherein the first damping comb is arranged on the mass and the second damping comb is arranged movably on a deflecting structure, and wherein, when the mass is deflected in a first direction, the second damping comb is moved via the deflecting structure relative to the substrate in a second direction opposite the first direction.