US 12,448,276 B2
MEMS microphone including a cross beam assembly
Kaijie Wang, Shenzhen (CN); and Bei Tong, Shenzhen (CN)
Assigned to AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan (CN)
Filed by AAC Kaitai Technologies (Wuhan) CO., LTD, China (CN)
Filed on Jun. 7, 2022, as Appl. No. 17/833,917.
Claims priority of application No. 202123253560.2 (CN), filed on Dec. 22, 2021.
Prior Publication US 2023/0192472 A1, Jun. 22, 2023
Int. Cl. B81B 3/00 (2006.01)
CPC B81B 3/0021 (2013.01) [B81B 3/0094 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A Micro-Electro-Mechanical System (MEMS) microphone, comprising:
a substrate;
a vibration diaphragm system; and
a housing;
wherein the substrate comprises a back cavity, the vibration diaphragm system is disposed on one side of the substrate, and the housing is disposed to enclose the vibration diaphragm system and connected to the one side of the substrate, where the one side of the substrate is close to the vibration diaphragm system; the vibration diaphragm system comprises a cross beam assembly and at least two sub-vibration diaphragm assemblies, the cross beam assembly is connected to the housing, the at least two sub-vibration diaphragm assemblies are connected to the cross beam assembly and are disposed at intervals, and a slit is formed between adjacent two of the at least two sub-vibration diaphragm assemblies; one end, distal from the housing, of each of the at least two sub-vibration diaphragm assemblies is fixed to the cross beam assembly, first gaps are formed between the at least two sub-vibration diaphragm assemblies and inner sides of the housing, and the at least two sub-vibration diaphragm assemblies are suspended on the one side of the substrate through the cross beam assembly and the housing;
the cross beam assembly comprises a fixing member and cross beams; the fixing member is disposed in an enclosed area of the housing and the cross beams extend from a peripheral side of the fixing member and are fixed to the housing; the cross beams and the slit are in one-to-one correspondence, each of the cross beams is penetrated in a corresponding one of the slit, and the one end, distal from the housing, of each of the at least two sub-vibration diaphragm assemblies is fixed to the fixing member.