| CPC B65G 43/02 (2013.01) [H01L 21/67259 (2013.01); H01L 21/67715 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); B65G 2201/0297 (2013.01); B65G 2811/0678 (2013.01); B65G 2812/99 (2013.01)] | 16 Claims |

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1. A transfer system comprising:
a first travel rail including a first merging section;
a second travel rail merging the first travel rail at a merging point and including a second merging section overlapping with the first merging section;
a transfer/loading area defined in the second merging section and located upstream of the merging point; and
a controller configured to control an operation of at least one transfer vehicle moving along the first travel rail and the second travel rail,
wherein the transfer system is configured to accommodate a second transfer vehicle moving along the second travel rail and entering the transfer/loading area,
the transfer system is configured to subsequently accommodate, the second transfer vehicle starting a transfer/loading operation in the transfer/loading area,
the transfer system is configured to subsequently accommodate a first transfer vehicle moving along the first travel rail and entering the first merging section, and
the transfer system is configured to subsequently accommodate the first transfer vehicle passing through the merging point before the second transfer vehicle.
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