| CPC B25J 9/1664 (2013.01) [B25J 9/1692 (2013.01); B25J 19/022 (2013.01); H01L 21/681 (2013.01)] | 15 Claims |

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1. A robot control method using a non-contact displacement sensor, comprising steps of:
checking a normal position according to a robot's motion range through the non-contact displacement sensor installed horizontally to an end effector of the robot;
measuring displacement with respect to the end effector to obtain displacement data when a product is transferred by the robot;
obtaining vibration data through a vibration sensor coupled to the robot;
checking whether an abnormal state exists using the obtained displacement data and vibration data; and
transmitting an adjustment value to correct displacement distortion of the robot when the robot is confirmed to be in the abnormal state.
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