US 12,447,555 B2
Processing apparatus and article manufacturing method
Saori Hasegawa, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 12, 2023, as Appl. No. 18/465,545.
Claims priority of application No. 2022-156073 (JP), filed on Sep. 29, 2022.
Prior Publication US 2024/0109151 A1, Apr. 4, 2024
Int. Cl. G02B 26/08 (2006.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01)
CPC B23K 26/073 (2013.01) [B23K 26/0648 (2013.01); B23K 26/0665 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A processing apparatus comprising:
an optical device that guides a laser beam emitted from a light source to a target object, the processing apparatus processing the target object with light emitted from the optical device,
wherein the optical device includes a correction mechanism that corrects rotationally asymmetric optical characteristics of the optical device,
the correction mechanism includes at least two optical elements with rotationally asymmetric power, and a mechanism that enables the at least two optical elements to rotate about their respective optical axes,
the amount of rotationally asymmetric optical characteristics changes due to a rotation angle difference between the at least two optical elements, and
a direction of the rotationally asymmetric optical characteristics changes depending on a common rotation angle of the at least two optical elements.