US 12,120,925 B2
Descending etching resistance in advanced substrate patterning
Chung-chia Chen, San Jose, CA (US); Ji Young Choung, Hwaseong-si (KR); Dieter Haas, San Jose, CA (US); Yu-hsin Lin, Zhubei (TW); Jungmin Lee, Santa Clara, CA (US); Wen-Hao Wu, San Jose, CA (US); and Si Kyoung Kim, Gwangju-si (KR)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 17, 2023, as Appl. No. 18/301,805.
Application 18/301,805 is a continuation of application No. 17/881,358, filed on Aug. 4, 2022, granted, now 11,665,931.
Claims priority of provisional application 63/229,266, filed on Aug. 4, 2021.
Prior Publication US 2023/0255064 A1, Aug. 10, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H10K 59/122 (2023.01); H10K 50/844 (2023.01); H10K 71/00 (2023.01); H10K 102/00 (2023.01)
CPC H10K 59/122 (2023.02) [H10K 50/844 (2023.02); H10K 71/00 (2023.02); H10K 2102/00 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a substrate;
pixel-defining layer (PDL) structures disposed over the substrate; and
a plurality of overhang structures, each overhang structure defined by an extension of a second structure extending laterally past a first structure, each first structure disposed over an upper surface of each PDL structure, adjacent overhang structures of the plurality overhang structures defining a plurality of sub-pixels including a first sub-pixel and a second sub-pixel;
the first sub-pixel comprising:
a first anode;
a first organic light-emitting diode (OLED) material disposed over the first anode;
a first cathode disposed over the first OLED material; and
a first encapsulation layer disposed over the first cathode, extending under the adjacent overhang structures, and disposed over a topmost surface of the extension of the second structure, the first encapsulation layer having a first thickness; and
the second sub-pixel comprising:
a second anode;
a second organic light-emitting diode (OLED) material disposed over the second anode;
a second cathode disposed over the second OLED material; and
a second encapsulation layer disposed over the second cathode, extending under the adjacent overhang structures, the second encapsulation layer having a second thickness different than the first thickness and is separated from the first encapsulation layer over the topmost surface by a passivation layer disposed on the topmost surface and disposed in a well of the second sub-pixel.