US 12,120,807 B2
Mechanical alignment of x-ray sources
Johan Kronstedt, Kista (SE); Ulf Lundström, Kista (SE); and Per Takman, Kista (SE)
Assigned to Excillium AB, Kista (SE)
Filed by Excillum AB, Kista (SE)
Filed on Sep. 21, 2023, as Appl. No. 18/471,588.
Application 18/471,588 is a continuation of application No. 17/290,580, granted, now 11,800,625, previously published as PCT/EP2019/080022, filed on Nov. 4, 2019.
Claims priority of application No. 18204286 (EP), filed on Nov. 5, 2018.
Prior Publication US 2024/0015875 A1, Jan. 11, 2024
Int. Cl. H05G 2/00 (2006.01)
CPC H05G 2/005 (2013.01) [H05G 2/003 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method for aligning an X-ray source, comprising:
providing an electron beam directed towards a liquid jet target such that the electron beam interacts with the liquid jet target to generate X-ray radiation;
scanning the electron beam over the liquid jet target;
generating a signal indicating an orientation of the liquid jet target relative to an electron beam focus by monitoring a quantity indicative of an interaction between the electron beam and the liquid jet target as a function of electron beam position; and
adjusting the orientation of the liquid jet target relative to the electron beam focus based on the generated signal;
wherein the liquid jet target is generated by a nozzle and the method further comprises:
generating an image of the liquid jet target by repeated scanning of the electron beam over the target and recording the quantity indicative of the interaction between the electron beam and the liquid jet target;
adjusting the orientation of the target by moving the nozzle until a current image of the target correlates to a previously acquired image of a previous target.