US 12,120,781 B2
Method of manufacturing holding device, method of manufacturing structure for holding device, and holding device
Hideki Uematsu, Nagoya (JP); Junji Suzuki, Nagoya (JP); Kazuki Izumihara, Nagoya (JP); and Yuji Kawamura, Nagoya (JP)
Assigned to NITERRA CO., LTD., Nagoya (JP)
Appl. No. 17/257,406
Filed by NGK SPARK PLUG CO., LTD., Nagoya (JP)
PCT Filed Mar. 27, 2020, PCT No. PCT/JP2020/013967
§ 371(c)(1), (2) Date Dec. 31, 2020,
PCT Pub. No. WO2020/213368, PCT Pub. Date Oct. 22, 2020.
Claims priority of application No. 2019-077505 (JP), filed on Apr. 16, 2019.
Prior Publication US 2021/0274599 A1, Sep. 2, 2021
Int. Cl. H05B 3/03 (2006.01); H01L 21/683 (2006.01); H05B 1/02 (2006.01); H05B 3/06 (2006.01); H05B 3/26 (2006.01)
CPC H05B 3/03 (2013.01) [H01L 21/6833 (2013.01); H05B 1/0233 (2013.01); H05B 3/06 (2013.01); H05B 3/265 (2013.01); H05B 2203/017 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A holding device that holds an object on a first surface of a plate-shaped member, the holding device comprising:
the plate-shaped member that has the first surface substantially orthogonal to a first direction and a second surface on a side opposite to the first surface, the plate-shaped member including a first portion that includes the first surface and a fifth surface on a side opposite to the first surface, a second portion that includes the second surface, a fourth surface facing the fifth surface, and a portion made of a ceramic, and a first joining portion that is disposed between the fifth surface and the fourth surface, and that joins the fifth surface and the fourth surface to each other;
a heater electrode that is disposed at the second portion of the plate-shaped member and that is formed from a resistance heater;
a base member that has a third surface, that is disposed so that the third surface is positioned on a side of the second surface of the plate-shaped member, and that includes a cooling mechanism; and
a second joining portion that is disposed between the second surface of the plate-shaped member and the third surface of the base member, and that joins the plate-shaped member and the base member to each other,
wherein a groove at which a portion of a surface defining the groove is constituted by a portion of a surface of the heater electrode is formed in the fourth surface among surfaces of the second portion of the plate-shaped member, and
wherein when electric power is supplied to the heater electrode and cooling is performed with the cooling mechanism, and when a difference between a temperature of the heater electrode and a temperature of the cooling is greater than or equal to 50° C., a difference between a maximum value and a minimum value of a temperature at the first surface is less than or equal to 3.5° C.