| CPC H04R 19/04 (2013.01) [H04R 2201/003 (2013.01)] | 14 Claims |
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1. A cantilever microphone, comprising:
a substrate;
a cantilever comprising a rotor frame and a plate covering the rotor frame, wherein the cantilever comprises a first edge fixed to the substrate and a second edge opposite to the first edge, a plurality of rotor comb fingers is attached to the plate at an edge of the plate adjacent to the second edge; and
a stator fixed to the substrate or attached to a sub structure to allow some displacement from the substrate, wherein the stator comprises a plurality of stator comb fingers, and the plurality of stator comb fingers are interdigitated with the plurality of rotor comb fingers,
wherein a gap is provided between the plurality of rotor comb fingers and the rotor frame, and
wherein a material of the rotor frame comprises at least one of polycrystalline silicon, silicon nitride, silicon oxide, or silicon carbide,
wherein a distance between the plate and an end of one of the plurality of stator comb fingers adjacent to the plate is controlled, to decrease electrostatic non-linearities and distortion.
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