US 12,119,368 B2
Method for manufacturing light emitting elements and display device including light emitting elements
Seung A Lee, Seoul (KR); Dong Uk Kim, Hwaseong-si (KR); Hyun Min Cho, Seoul (KR); Dae Hyun Kim, Hwaseong-si (KR); Jung Hong Min, Pyeongtaek-si (KR); Dong Eon Lee, Hwaseong-si (KR); and Hyung Rae Cha, Seoul (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Appl. No. 17/276,038
Filed by Samsung Display Co., LTD., Yongin-si (KR)
PCT Filed Apr. 23, 2019, PCT No. PCT/KR2019/004870
§ 371(c)(1), (2) Date Mar. 12, 2021,
PCT Pub. No. WO2020/054938, PCT Pub. Date Mar. 19, 2020.
Claims priority of application No. 10-2018-0109391 (KR), filed on Sep. 13, 2018.
Prior Publication US 2022/0052106 A1, Feb. 17, 2022
Int. Cl. H01L 33/00 (2010.01); H01L 27/15 (2006.01); H01L 33/24 (2010.01); H01L 33/44 (2010.01); H01L 33/60 (2010.01)
CPC H01L 27/156 (2013.01) [H01L 33/007 (2013.01); H01L 33/0093 (2020.05); H01L 33/0095 (2013.01); H01L 33/24 (2013.01); H01L 33/44 (2013.01); H01L 33/60 (2013.01); H01L 2933/0025 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of manufacturing a light emitting element, the method comprising:
providing a semiconductor structure on a substrate, the semiconductor structure including different wavelength regions that emit light having different wavelength bands from each other;
after the semiconductor structure is provided, measuring the semiconductor structure to determine the different wavelength regions that emit light having the different wavelength bands from each other;
after measuring the semiconductor structure, forming nanopatterns spaced apart from each other on the semiconductor structure based on a respective wavelength region, the nanopatterns of each wavelength regions having different diameters from the nanopatterns of other wavelength regions, wherein a diameter of nanopatterns for each respective wavelength region is selected so as to cause different element rods formed from different wavelength regions to emit a common band of light; and
etching the semiconductor structure to form the element rods.