US 12,119,278 B2
Method of manufacturing a supporting glass substrate
Hiroki Katayama, Shiga (JP)
Assigned to NIPPON ELECTRIC GLASS CO., LTD., Shiga (JP)
Filed by Nippon Electric Glass Co., Ltd., Shiga (JP)
Filed on Jul. 10, 2023, as Appl. No. 18/219,941.
Application 17/388,521 is a division of application No. 15/507,876, abandoned, previously published as PCT/JP2015/066325, filed on Jun. 5, 2015.
Application 18/219,941 is a continuation of application No. 17/388,521, filed on Jul. 29, 2021, granted, now 11,749,574.
Claims priority of application No. 2014-194598 (JP), filed on Sep. 25, 2014.
Prior Publication US 2023/0352355 A1, Nov. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 23/15 (2006.01); B24B 37/07 (2012.01); B32B 17/06 (2006.01); C03C 3/091 (2006.01); C03C 3/093 (2006.01); C03C 19/00 (2006.01); H01L 21/56 (2006.01); H01L 23/00 (2006.01); H01L 23/12 (2006.01)
CPC H01L 23/15 (2013.01) [B24B 37/07 (2013.01); B32B 17/06 (2013.01); C03C 3/091 (2013.01); C03C 3/093 (2013.01); C03C 19/00 (2013.01); H01L 21/56 (2013.01); H01L 21/561 (2013.01); H01L 21/568 (2013.01); H01L 23/12 (2013.01); H01L 24/19 (2013.01); H01L 24/96 (2013.01); B32B 2307/538 (2013.01); B32B 2457/14 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/12105 (2013.01); H01L 2924/3511 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method of manufacturing a supporting glass substrate, the method comprising the steps of:
preparing a supporting glass substrate free of any through holes, the supporting glass substrate comprising a first surface and a second surface opposite to the first surface;
sandwiching the first surface and the second surface of the supporting glass substrate with a pair of polishing pads; and
polishing the first surface and the second surface of the supporting glass substrate, which is free of any through holes, so that the supporting glass substrate has a total thickness variation of less than 5.0 μm while rotating the supporting glass substrate and the pair of polishing pads together so that a part of the supporting glass substrate intermittently extends off from the polishing pads during the polishing.