CPC H01L 21/67724 (2013.01) [B65G 1/0457 (2013.01); G05D 1/0287 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); B65G 2201/0297 (2013.01)] | 12 Claims |
1. A transport system comprising:
a plurality of transport vehicles; and
a controller that controls the plurality of transport vehicles,
wherein the transport vehicle comprises:
a travel unit that causes the transport vehicle travel; and
a transfer section that moves substantially horizontally to the travel unit and transfers an article from/to a placement table,
wherein, when the transport vehicle transfers an article from/to the placement table, the controller performs a blocking control that prohibits transport vehicles other than the transport vehicle from entering a blocking zone corresponding to an area occupied by the transport vehicle at the time of the article transfer in a plan view,
the transport vehicle travels along the access route to the placement table in a first direction when transferring an article from/to the placement table, and
an area of the blocking zone when the transport vehicle accesses to the placement table in the first direction is equal to or less than an area of the blocking zone when the transport vehicle accesses to the placement table in a second direction different from the first direction.
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