US 12,119,210 B2
Fastening automation apparatus for upper electrode
Joohee Kim, Ansan-si (KR); Hyunjung Lee, Hwaseong-si (KR); Sungwook Jung, Seoul (KR); Sunho Kim, Seoul (KR); Sungjin Kim, Suwon-si (KR); Jungwook Kim, Seongnam-si (KR); and Hosun Yoo, Seongnam-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Mar. 25, 2021, as Appl. No. 17/213,017.
Claims priority of application No. 10-2020-0110519 (KR), filed on Aug. 31, 2020.
Prior Publication US 2022/0068609 A1, Mar. 3, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32532 (2013.01) [H01J 37/32642 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fastening apparatus, comprising:
a ring;
a plurality of fastening modules movably secured to the ring, wherein each fastening module is movable in a radial direction on the ring; and
a plurality of guide members installed on the ring, wherein each guide member guides movement of a respective one of the plurality of fastening modules;
wherein each one of the plurality of fastening modules comprises a first frame that is movable in the radial direction, a driving source installed below the first frame, a driving shaft that transmits a driving force from the driving source, a power transmission unit connected to the driving shaft, and a fastening bit connected to the power transmission unit that rotates; and
wherein the plurality of fastening modules operate simultaneously to install an upper electrode of an etching facility in the etching facility.