US 12,118,712 B2
Inspection system, management apparatus, inspection method, recording medium, and manufacturing method of article
Mika Shiki, Tokyo (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Nov. 17, 2021, as Appl. No. 17/455,351.
Claims priority of application No. 2020-194820 (JP), filed on Nov. 25, 2020.
Prior Publication US 2022/0164938 A1, May 26, 2022
Int. Cl. G06T 7/00 (2017.01); G06F 18/21 (2023.01); G06V 10/22 (2022.01); G06V 10/75 (2022.01)
CPC G06T 7/001 (2013.01) [G06F 18/21 (2023.01); G06V 10/22 (2022.01); G06V 10/751 (2022.01); G06T 2207/20081 (2013.01); G06T 2207/30164 (2013.01)] 14 Claims
OG exemplary drawing
 
10. An inspection method comprising:
performing, by a processing unit, a first inspection step on a first workpiece, wherein the first inspection step includes obtaining a first image of the first workpiece from an image capturing unit and determining, based on the first image, whether the first workpiece includes a defect;
performing, by the processing unit, a second inspection step on the first workpiece, wherein the second inspection step includes obtaining a second image of the first workpiece from the image capturing unit and determining, based on the second image, whether the first workpiece includes a defect, wherein the second inspection step is performed after the first inspection step;
extracting, by the processing unit, a defective portion candidate of the first workpiece based on the second image and on the first image; and
changing, by the processing unit, an inspection condition of the image capturing unit or the processing unit in the first inspection step based on the extracted defective portion candidate of the first workpiece.