US 12,117,734 B2
Metrology method and device for determining a complex-valued field
Nitesh Pandey, Silicon Valley (CA); and Alexander Prasetya Konijnenberg, Veldhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/638,975
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Jul. 31, 2020, PCT No. PCT/EP2020/071666
§ 371(c)(1), (2) Date Feb. 28, 2022,
PCT Pub. No. WO2021/043514, PCT Pub. Date Mar. 11, 2021.
Claims priority of application No. 19194973 (EP), filed on Sep. 2, 2019.
Prior Publication US 2022/0299886 A1, Sep. 22, 2022
Int. Cl. G03F 7/00 (2006.01); G01N 21/47 (2006.01)
CPC G03F 7/70633 (2013.01) [G01N 21/4738 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method comprising:
obtaining an amplitude profile of scattered radiation relating to a measurement of a structure on a substrate;
obtaining a reference phase profile relating to a reference measurement of at least one reference structure on a reference substrate, the at least one reference structure being a different structure than the structure, and the at least one reference structure and the structure being nominally identical in terms of at least a plurality of key parameters; and
determining a complex-valued field to describe the structure from the amplitude profile and the reference phase profile.