David Ferdinand Vles, Eindhoven (NL); Chaitanya Krishna Ande, Eindhoven (NL); Antonius Franciscus Johannes De Groot, Someren (NL); Adrianus Johannes Maria Giesbers, Vlijmen (NL); Johannes Joseph Janssen, Beesel (NL); Paul Janssen, Eindhoven (NL); Johan Hendrik Klootwijk, Eindhoven (NL); Peter Simon Antonius Knapen, Deurne (NL); Evgenia Kurganova, Nijmegen (NL); Marcel Peter Meijer, Eindhoven (NL); Wouter Rogier Meijerink, Eindhoven (NL); Maxim Aleksandrovich Nasalevich, Eindhoven (NL); Arnoud Willem Notenboom, Rosmalen (NL); Raymond Olsman, Bennekom (NL); Hrishikesh Patel, Eindhoven (NL); Mária Péter, Eindhoven (NL); Gerrit van den Bosch, Geldermalsen (NL); Wilhelmus Theodorus Anthonius Johannes van den Einden, Deurne (NL); Willem Joan Van Der Zande, Bussum (NL); Pieter-Jan Van Zwol, Eindhoven (NL); Johannes Petrus Martinus Bernardus Vermeulen, Leende (NL); Willem-Pieter Voorthuijzen, 's-Hertogenbosch (NL); Hendrikus Jan Wondergem, Veldhoven (NL); and Aleksandar Nikolov Zdravkov, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Jul. 11, 2023, as Appl. No. 18/220,799.
Application 18/220,799 is a continuation of application No. 17/548,944, filed on Dec. 13, 2021, granted, now 11,754,918.
Application 17/548,944 is a continuation of application No. 16/614,815, granted, now 11,231,646, previously published as PCT/EP2018/065127, filed on Jun. 8, 2018.
Claims priority of application No. 17176205 (EP), filed on Jun. 15, 2017; and application No. 17190503 (EP), filed on Sep. 12, 2017.
Prior Publication US 2024/0027893 A1, Jan. 25, 2024
Int. Cl. G03F 1/64 (2012.01)
CPC G03F 1/64 (2013.01)
20 Claims
1. A pellicle assembly comprising:
a pellicle frame defining a surface onto which a pellicle is, or to be, attached, the pellicle frame comprising a first material having a first coefficient of thermal expansion and a second material having a second different coefficient of thermal expansion.