| CPC G01R 31/2875 (2013.01) [F28F 3/12 (2013.01)] | 14 Claims |
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1. An inspection system comprising:
a first chiller unit configured to supply a first heating medium controlled to a first temperature;
a second chiller unit, separate from the first chiller unit, and configured to supply a second heating medium controlled to a second temperature lower than the first temperature;
a stage having a flow passage supplied with a heating medium mixture mixed with the first heating medium from the first chiller unit and the second heating medium from the second chiller unit at a desired mixing ratio;
and a controller, wherein
the inspection system performs an inspection with respect to a substrate placed on the stage, and
the controller performs a process including
acquiring a temperature of the heating medium mixture at an inlet of the flow passage, and a temperature of the heating medium mixture at an outlet of the flow passage, measured by respective temperature sensors, and
correcting the mixing ratio of the first heating medium and the second heating medium, based on both a flow rate of the heating medium mixture through the flow passage, and a difference between the temperature of the heating medium mixture at the inlet of the flow passage and the temperature of the heating medium mixture at the outlet of the flow passage.
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