US 12,446,470 B2
Technologies for microelectromechanical systems with composable piezoelectric actuators
Jason V. Clark, Auburn, AL (US)
Assigned to AUBURN UNIVERSITY, Auburn, AL (US)
Filed by AUBURN UNIVERSITY, Auburn, AL (US)
Filed on Feb. 7, 2022, as Appl. No. 17/666,015.
Claims priority of provisional application 63/146,802, filed on Feb. 8, 2021.
Prior Publication US 2022/0254982 A1, Aug. 11, 2022
Int. Cl. H01L 41/04 (2006.01); B81B 3/00 (2006.01); H01L 41/047 (2006.01); H10N 30/20 (2023.01); H10N 30/857 (2023.01)
CPC H10N 30/2023 (2023.02) [B81B 3/0021 (2013.01); B81B 3/0035 (2013.01); H10N 30/857 (2023.02); B81B 2201/03 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A microelectromechanical system (MEMS) system, the system comprising:
a composable piezoelectric actuator comprising an elongated rod coupled to a first electrode and a second electrode, wherein the elongated rod is piezoelectric, and wherein the first electrode and the second electrode are configured such that in response to a voltage applied across the first electrode and the second electrode, an end of the actuator moves from an initial position to a displaced position;
a first terminal electrically coupled to the first electrode of the actuator;
a second terminal electrically coupled to the second electrode of the actuator; and
a resistive element electrically coupled between the first terminal and the second terminal;
wherein in response to a voltage applied across the resistive element, the actuator moves from the initial position in which the end of the actuator is spaced apart from the second terminal to the displaced position in which the end of the actuator contacts the second terminal, and wherein when the actuator is in the displaced position the first terminal, the first electrode, and the second terminal are electrically connected.