	US 12,446,387 B2
	Display device and manufacturing method thereof
Sung Kook Park, Yongin-si (KR); Dae Ho Song, Yongin-si (KR); Min Woo Kim, Yongin-si (KR); Byung Choon Yang, Yongin-si (KR); So Yeon Yoon, Yongin-si (KR); Hyung Il Jeon, Yongin-si (KR); Joo Woan Cho, Yongin-si (KR); and Jin Woo Choi, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Mar. 11, 2022, as Appl. No. 17/692,823.
Claims priority of provisional application 63/182,270, filed on Apr. 30, 2021.
Claims priority of application No. 10-2021-0056919 (KR), filed on Apr. 30, 2021; and application No. 10-2021-0073047 (KR), filed on Jun. 4, 2021.
Prior Publication US 2022/0352249 A1, Nov. 3, 2022
Int. Cl. H10H 29/14 (2025.01); B82Y 20/00 (2011.01); H10H 20/01 (2025.01); H10H 20/851 (2025.01); H10H 20/856 (2025.01)

CPC H10H 29/142 (2025.01) [H10H 20/01 (2025.01); H10H 20/8512 (2025.01); H10H 20/856 (2025.01); B82Y 20/00 (2013.01); H10H 20/0361 (2025.01)]

18 Claims

12. A manufacturing method of a display device, comprising:

forming light-emitting elements on a first surface of a base layer;

coupling the light-emitting elements to a substrate; and

etching a second surface of the base layer to form groove patterns overlapping with the light-emitting elements, respectively,

wherein the base layer comprises a silicon material, and the groove patterns penetrate the silicon material of the base layer from the second surface of the base layer, and

wherein the method further comprises forming a color conversion layer in the groove patterns.