US 12,446,346 B2
Photoelectric conversion element, image sensing device, and imaging system
Yu Ookubo, Taito-ku (JP); and Tomohiro Nakagome, Taito-ku (JP)
Assigned to TOPPAN Inc., Tokyo (JP)
Filed by TOPPAN Inc., Tokyo (JP)
Filed on Feb. 23, 2022, as Appl. No. 17/678,304.
Application 17/678,304 is a continuation of application No. PCT/JP2020/032568, filed on Aug. 28, 2020.
Claims priority of application No. 2019-157643 (JP), filed on Aug. 30, 2019.
Prior Publication US 2022/0278155 A1, Sep. 1, 2022
Int. Cl. G01S 17/894 (2020.01); G01S 7/481 (2006.01); G01S 7/4863 (2020.01); G02B 3/00 (2006.01); H10F 39/00 (2025.01); H10F 39/18 (2025.01)
CPC H10F 39/8063 (2025.01) [G01S 7/4816 (2013.01); G01S 7/4863 (2013.01); G01S 17/894 (2020.01); G02B 3/0037 (2013.01); H10F 39/184 (2025.01); H10F 39/8057 (2025.01)] 16 Claims
OG exemplary drawing
 
1. A photoelectric conversion element, comprising:
a substrate having a first surface on which reflected light reflected from an object is incident, and including a first semiconductor region and a second semiconductor region, the second semiconductor region being formed in a direction perpendicular to the first surface and extended from the first surface toward an inside of the substrate; and
an optical element positioned on a first surface side of the substrate and configured to collect the reflected light to the second semiconductor region,
wherein the first semiconductor region comprises a first conductive type semiconductor, the second semiconductor region comprises a second conductive type semiconductor whose conductive type is different from that of the first conductive type semiconductor, and
the substrate and the optical element are configured such that a relational expression 0.95*exp(−α(λ)*z)≤B(z)/A1≤1.05*exp(−α(λ)*z) is established at a distance z=z0 when A1≥A2 is satisfied and a distance z0=In(2)/α(λ) is established,
where I is incident energy of the reflected light incident on the photoelectric conversion element,
α(λ) is an absorption coefficient of the reflected light in the substrate where λ is an average wavelength of a light source,
A1 is incident energy of the reflected light in a predetermined region on the first surface,
A2 is incident energy of the reflected light in the predetermined region on the first surface in a case where the photoelectric conversion element does not include the optical element, and
B(z) is incident energy of the reflected light in a region translated from the predetermined region by a predetermined distance z in a thickness direction of the substrate.