US 12,446,339 B2
Sensors having an active surface
Arvin Emadi, Hayward, CA (US); Arnaud Rival, Saint Nazaire les Eymes (FR); and Ali Agah, Menlo Park, CA (US)
Assigned to ILLUMINA, INC., San Diego, CA (US)
Filed by Illumina, Inc., San Diego, CA (US)
Filed on Jan. 10, 2024, as Appl. No. 18/408,992.
Application 17/804,023 is a division of application No. 15/929,760, filed on May 20, 2020, granted, now 11,387,269, issued on Jul. 12, 2022.
Application 18/408,992 is a continuation of application No. 17/804,023, filed on May 25, 2022, granted, now 12,062,674.
Claims priority of provisional application 62/850,894, filed on May 21, 2019.
Prior Publication US 2024/0145505 A1, May 2, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H10F 39/00 (2025.01); H01L 23/00 (2006.01); H10F 39/18 (2025.01)
CPC H10F 39/804 (2025.01) [H01L 24/05 (2013.01); H10F 39/014 (2025.01); H10F 39/028 (2025.01); H10F 39/18 (2025.01); H10F 39/811 (2025.01)] 18 Claims
OG exemplary drawing
 
1. A method comprising:
delivering a reagent over an active surface of a sensor of a flow cell, wherein the flow cell comprises:
a substrate having a substrate bond pad;
the sensor over the substrate, the sensor comprising the active surface and a sensor bond pad;
a molding layer over the substrate and covering sides of the sensor, the molding layer having a molding height extending vertically from relative to a top surface of the substrate, the molding height being greater than a height of the active surface of the sensor, wherein the height of the active surface of the sensor extends vertically from relative to the top surface of the substrate; and
a lidding layer over a sufficiently planar upper surface of the molding layer and over the active surface;
wherein the lidding layer and the molding layer collectively form a space over the active surface of the sensor, the space defining a flow channel.