US 12,446,323 B2
Semiconductor electrostatic discharge protection device
Sheng-Fu Hsu, Hsinchu (TW); Chen-Yi Lee, Keelung (TW); Lin-Yu Huang, Hsinchu (TW); and Shih-Fan Chen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Jan. 9, 2023, as Appl. No. 18/152,146.
Prior Publication US 2024/0234410 A1, Jul. 11, 2024
Int. Cl. H10D 84/85 (2025.01); H10D 89/60 (2025.01)
CPC H10D 89/811 (2025.01) [H10D 84/85 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A semiconductor ESD protection device comprising:
a pair of source regions;
a pair of gate structures disposed between the pair of source regions and extending along a direction;
a drain region disposed between the pair of gate structures;
a plurality of first conductive contacts disposed on the source regions and arranged along the direction;
a plurality of second conductive contacts disposed on the gate structures;
a plurality of third conductive contacts disposed on the drain region and arranged along the direction; and
a dummy structure disposed over the drain region and between the gate structures and between the third conductive contacts.