US 12,446,315 B2
Display device and manufacturing method thereof
SungJun Yun, Gyeonggi-do (KR); PilSang Yun, Gyeonggi-do (KR); Taegyun Kim, Gyeonggi-do (KR); MinSu Kim, Gyeonggi-do (KR); InTak Cho, Gyeonggi-do (KR); and ISak Lee, Gyeonggi-do (KR)
Assigned to LG Display Co., Ltd., Seoul (KR)
Filed by LG Display Co., Ltd., Seoul (KR)
Filed on Oct. 26, 2022, as Appl. No. 17/974,430.
Claims priority of application No. 10-2022-0064273 (KR), filed on May 25, 2022.
Prior Publication US 2023/0411409 A1, Dec. 21, 2023
Int. Cl. H10D 86/60 (2025.01); H10D 86/01 (2025.01); H10D 86/40 (2025.01)
CPC H10D 86/60 (2025.01) [H10D 86/021 (2025.01); H10D 86/451 (2025.01); H10D 86/441 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A display device comprising:
a substrate;
an active layer disposed on the substrate;
a gate insulating film disposed on the active layer; and
a gate electrode disposed on the gate insulating film,
wherein the gate insulating film includes a first portion and a second portion,
wherein the first portion is closer to the active layer than the second portion, and the second portion is closer to the gate electrode than the first portion, and
the gate insulating film includes two or more elements, each of the two or more elements having different component concentrations in one or more of mass or volume in the first portion and the second portion,
wherein the two or more elements include a first element of hydrogen and a second element of one or more of silicon or nitrogen, the first portion having a greater component concentration of the first element of hydrogen than the second portion, and the first portion having a greater component concentration of the second element of one or more of silicon or nitrogen than the second portion.