US 12,446,246 B2
Field-effect transistor device
Aryan Afzalian, Chastre (BE); Julien Ryckaert, Schaerbeek (BE); and Naoto Horiguchi, Leuven (BE)
Assigned to IMEC VZW, Leuven (BE)
Filed by IMEC VZW, Leuven (BE)
Filed on Dec. 1, 2022, as Appl. No. 18/060,954.
Claims priority of application No. 21212147 (EP), filed on Dec. 3, 2021.
Prior Publication US 2023/0178640 A1, Jun. 8, 2023
Int. Cl. H01L 29/775 (2006.01); H01L 21/8238 (2006.01); H01L 27/092 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H10D 30/01 (2025.01); H10D 30/43 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 62/13 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/85 (2025.01)
CPC H10D 30/43 (2025.01) [H10D 30/014 (2025.01); H10D 30/6735 (2025.01); H10D 62/121 (2025.01); H10D 62/151 (2025.01); H10D 84/0167 (2025.01); H10D 84/017 (2025.01); H10D 84/038 (2025.01); H10D 84/85 (2025.01)] 22 Claims
OG exemplary drawing
 
1. A field-effect transistor (FET) device comprising:
a substrate, a source body, a drain body and a set of vertically spaced apart channel layers extending between the source body and the drain body in a first direction along the substrate,
the source body comprising a common source body portion arranged at a first lateral side of the set of channel layers and a set of vertically spaced apart source prongs protruding from the common source body portion in a second direction along the substrate, transverse to the first direction,
the drain body comprising a common drain body portion arranged at the first lateral side of the set of channel layers and a set of drain prongs protruding from the common drain body portion in the second direction; and
a gate body comprising a common gate body portion arranged at a second lateral side of the set of channel layers, opposite the first lateral side, and a set of gate prongs protruding from the common gate body gate portion in a third direction along the substrate, opposite the first direction;
wherein each channel layer comprises a first side and an opposite second side, the first side arranged in abutment with a topside or an underside of a pair of source and drain prongs and the second side facing a gate prong.