US 12,446,162 B2
Screen mask inspection device, solder printing inspection device, and method for inspecting screen mask
Kazuyoshi Kikuchi, Aichi (JP); Takayuki Shinyama, Aichi (JP); Tsuyoshi Ohyama, Aichi (JP); and Norihiko Sakaida, Aichi (JP)
Assigned to CKD Corporation, Aichi (JP)
Filed by CKD CORPORATION, Aichi (JP)
Filed on Sep. 27, 2022, as Appl. No. 17/953,888.
Application 17/953,888 is a continuation of application No. PCT/JP2021/014141, filed on Apr. 1, 2021.
Claims priority of application No. 2020-098245 (JP), filed on Jun. 5, 2020.
Prior Publication US 2023/0014796 A1, Jan. 19, 2023
Int. Cl. H05K 3/34 (2006.01); B23K 1/00 (2006.01); B41F 15/08 (2006.01); B41F 15/36 (2006.01); B41F 33/00 (2006.01); B41F 33/16 (2006.01); G01N 21/89 (2006.01); G01N 21/956 (2006.01); H05K 1/02 (2006.01)
CPC H05K 3/3452 (2013.01) [B23K 1/00 (2013.01); B41F 15/08 (2013.01); B41F 15/36 (2013.01); B41F 33/0027 (2013.01); B41F 33/0036 (2013.01); B41F 33/0081 (2013.01); B41F 33/16 (2013.01); G01N 21/8914 (2013.01); G01N 21/95607 (2013.01); H05K 1/0269 (2013.01); H05K 3/3485 (2020.08); B41P 2215/114 (2013.01); G01N 2021/8918 (2013.01); G01N 2021/95646 (2013.01); H05K 2203/163 (2013.01); H05K 2203/166 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A screen mask inspection device, comprising:
a screen mask including a screen opening that forms a printing pattern;
a printing device that prints a solder paste on a substrate via the screen opening;
a squeegee that is movable in a predetermined direction while contacting an upper surface of the screen mask;
an inspection camera that captures an image of the solder paste printed on the substrate; and
an inspection control device that:
based on the image captured by the inspection camera, detects, as solder position information, a difference between amounts of positional misalignments of the solder paste printed at two end portions most distant from each other along a moving direction of the squeegee on the substrate; and
based on the solder position information, identifies whether at least one of a deformation amount and an amount of positional misalignment of the screen mask is within a predetermined allowable range.