| CPC H05H 6/00 (2013.01) [H05H 3/06 (2013.01)] | 23 Claims |

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1. A neutron generation generating target, comprising:
a substrate;
a neutron generation region positioned over the substrate; and
a passivation region positioned over the neutron generation region, wherein the passivation region comprises a first layer and a second layer,
wherein the neutron generation region comprises an objective material configured to generate neutrons, the first layer of the passivation region is configured to seal against diffusion of the objective material into the passivation region, and the first layer is between the second layer and the objective material, and wherein the first layer covers and extends beyond the objective material and the second layer covers and extends beyond the first layer.
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