US 12,446,141 B2
Contamination shield for mechanically insulating device
Armin Bernhard Ridinger, San Diego, CA (US); Kyle John Scaffidi, San Diego, CA (US); Nicolas John Ledesma, Escondido, CA (US); and Thomas Halloran, San Diego, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/920,620
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Apr. 8, 2021, PCT No. PCT/EP2021/059167
§ 371(c)(1), (2) Date Oct. 21, 2022,
PCT Pub. No. WO2021/223953, PCT Pub. Date Nov. 11, 2021.
Claims priority of provisional application 63/020,760, filed on May 6, 2020.
Prior Publication US 2023/0156898 A1, May 18, 2023
Int. Cl. H05G 2/00 (2006.01); F16L 51/02 (2006.01); F16L 59/08 (2006.01)
CPC H05G 2/0094 (2024.08) [F16L 51/026 (2013.01); F16L 59/08 (2013.01)] 31 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a mechanically insulating device comprising a flexible bellows extending between first and second flanges, the flexible bellows defining a bellows passageway that extends along an axial direction between openings of the first and second flanges;
a rigid inner sleeve affixed to or supported by the first flange and extending along the bellows passageway in the axial direction, the rigid inner sleeve having an outer diameter that is less than an inner diameter of the flexible bellows; and
a shield device at least partly fixed to or supported by the second flange and defining an axial device opening having a diameter that is less than the inner diameter of the flexible bellows and is greater than the outer diameter of the rigid inner sleeve;
wherein the shield device comprises one or more disks and a disk housing defining an interior cavity configured to retain the one or more disks and constrain the one or more disks along the axial direction.