US 12,445,104 B2
FBAR filter with trap rich layer
Dror Hurwitz, Zhuhai (CN)
Assigned to ZHUHAI CRYSTAL RESONANCE TECHNOLOGIES CO., LTD., Tianjin (CN)
Filed by Zhuhai Crystal Resonance Technologies Co., Ltd., Tianjin (CN)
Filed on Nov. 4, 2021, as Appl. No. 17/518,742.
Prior Publication US 2023/0132706 A1, May 4, 2023
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/10 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01)
CPC H03H 9/02149 (2013.01) [H03H 3/02 (2013.01); H03H 9/105 (2013.01); H03H 9/13 (2013.01); H03H 9/174 (2013.01); H03H 2003/023 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An acoustic resonator, comprising:
a first electrode having a first planar portion;
a second electrode having a second planar portion disposed parallel to the first planar portion;
a piezoelectric layer disposed between and contacting both the first planar portion and the second planar portion;
a support layer bonded to the second electrode, the support layer having a trap-rich layer that degrades a carrier lifetimes of a free charge carrier; and
a silicon dioxide insulating layer interposed between the trap-rich layer and both the first electrode and the second electrode.