US 12,444,977 B2
Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus
Chan Young Choi, Suwon-si (KR); Ki Won Han, Anseong-si (KR); Wan Hee Jeong, Hwaseong-si (KR); Kyo Bong Kim, Seongnam-si (KR); Hee Chan Kim, Hwaseong-si (KR); Doo Hyun Baek, Hwaseong-si (KR); Sang-Oh Kim, Seoul (KR); and Hee Jae Byun, Yongin-si (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Apr. 26, 2023, as Appl. No. 18/307,092.
Claims priority of application No. 10-2022-0140437 (KR), filed on Oct. 27, 2022.
Prior Publication US 2024/0146103 A1, May 2, 2024
Int. Cl. H02J 50/00 (2016.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H02J 50/10 (2016.01)
CPC H02J 50/005 (2020.01) [H01L 21/67011 (2013.01); H01L 21/68707 (2013.01); H02J 50/10 (2016.02)] 18 Claims
OG exemplary drawing
 
1. A wireless power apparatus for a substrate treating apparatus comprising:
an outer housing having a main power line configured to generate an induced magnetic field by receiving a power, and a coupling part configured to couple at least two components among components which are positioned at a periphery of the main power line configured to fix the main power line; and
an inner housing positioned spaced apart from the outer housing and configured to generate an electromotive force through the induced magnetic field generated from the outer housing, and configured to supply the electromotive force to the substrate treating apparatus, and
wherein the coupling part includes a material at which an eddy current is not generated by the induced magnetic field,
wherein the outer housing further includes a drift prevention body configured to concentrate the induced magnetic field toward the inner housing, and the drift prevention body includes a ferrite material.