US 12,444,901 B2
Seed laser system for radiation source
Rostislav Rokitski, San Diego, CA (US); Philip M. Conklin, San Diego, CA (US); Cory Alan Stinson, San Diego, CA (US); Alexander Anthony Schafgans, San Diego, CA (US); and Christoffel Johannes Liebenberg, San Marcos, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/913,013
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Mar. 10, 2021, PCT No. PCT/EP2021/055958
§ 371(c)(1), (2) Date Sep. 20, 2022,
PCT Pub. No. WO2021/204481, PCT Pub. Date Oct. 14, 2021.
Claims priority of provisional application 63/007,759, filed on Apr. 9, 2020.
Prior Publication US 2023/0143962 A1, May 11, 2023
Int. Cl. H01S 3/23 (2006.01); H01S 3/00 (2006.01); H01S 3/10 (2006.01)
CPC H01S 3/2333 (2013.01) [H01S 3/0085 (2013.01); H01S 3/1003 (2013.01); H01S 3/10061 (2013.01); H01S 3/2391 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A radiation source, comprising:
a laser system comprising:
a first laser source configured to generate a first laser beam;
a second laser source configured to generate a second laser beam;
a dual-pass amplifier configured to:
perform dual-pass amplification of the first laser beam along a common beam path; and
perform dual-pass amplification of the second laser beam along the common beam path; and
an acousto-optic modulator disposed along the common beam path, the acousto-optic modulator being configured to:
receive the first laser beam from the dual-pass amplifier along the common beam path;
receive the second laser beam from the dual-pass amplifier along the common beam path;
generate a modified first laser beam based on a first wavelength of the first laser beam;
generate a modified second laser beam based on a second wavelength of the second laser beam;
output the modified first laser beam to the dual-pass amplifier along the common beam path; and
output the modified second laser beam to the dual-pass amplifier along the common beam path,
the dual-pass amplifier being further configured to:
perform the dual-pass amplification of the first laser beam based on:
a first amplification of the first laser beam; and
a second amplification of the modified first laser beam; and
perform the dual-pass amplification of the second laser beam based on:
a third amplification of the second laser beam; and
a fourth amplification of the modified second laser beam.