US 12,444,899 B2
Method and apparatus for controlling a pulse repetition rate of a pulsed laser beam, and pulsed laser oscillator with stabilized pulse repetition rate
Kemal Shafak, Hamburg (DE); Dai Anan, Hamburg (DE); and Franz Xaver Kaertner, Hamburg (DE)
Assigned to Cycle GmbH, Hamburg (DE); and Deutsches Elektronen-Synchroton DESY, Hamburg (DE)
Filed by Deutsches Elektronen-Synchrotron DESY, Hamburg (DE); and Cycle GmbH, Hamburg (DE)
Filed on Apr. 27, 2022, as Appl. No. 17/731,233.
Claims priority of application No. 21171191 (EP), filed on Apr. 29, 2021.
Prior Publication US 2022/0352687 A1, Nov. 3, 2022
Int. Cl. H01S 3/10 (2006.01); H01S 3/06 (2006.01); H01S 3/13 (2006.01); H01S 3/136 (2006.01)
CPC H01S 3/10046 (2013.01) [H01S 3/0602 (2013.01); H01S 3/1307 (2013.01); H01S 3/1305 (2013.01); H01S 3/136 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for controlling a pulse repetition rate of a pulsed laser beam created by a pulsed laser oscillator, comprising the steps of
generating the pulsed laser beam by the pulsed laser oscillator,
splitting the pulsed laser beam into a first pulsed split beam and a second pulsed split beam,
time-delaying the first pulsed split beam relative to the second pulsed split beam by an optical delay device,
generating a timing baseband signal including a timing jitter of the pulse repetition rate based on the time-delayed first pulsed split beam and the second pulsed split beam by a timing detector device, which is a correlation detector,
generating a feedback signal based on the timing baseband signal, and
applying the feedback signal on the pulsed laser oscillator and controlling the pulse repetition rate of the pulsed laser beam based on the feedback signal.