US 12,444,651 B2
Tungsten feature fill with nucleation inhibition
Anand Chandrashekar, Fremont, CA (US); Esther Jeng, Los Altos, CA (US); Raashina Humayun, Los Altos, CA (US); Michal Danek, Cupertino, CA (US); Juwen Gao, San Jose, CA (US); and Deqi Wang, San Jose, CA (US)
Assigned to Novellus Systems, Inc., Fremont, CA (US)
Filed by Novellus Systems, Inc., Fremont, CA (US)
Filed on Jun. 28, 2022, as Appl. No. 17/809,480.
Application 17/809,480 is a continuation of application No. 16/294,736, filed on Mar. 6, 2019, granted, now 11,410,883.
Application 16/294,736 is a continuation of application No. 13/774,350, filed on Feb. 22, 2013, granted, now 10,256,142, issued on Apr. 9, 2019.
Application 13/774,350 is a continuation in part of application No. 13/351,970, filed on Jan. 17, 2012, granted, now 8,435,894, issued on May 7, 2013.
Application 13/351,970 is a continuation of application No. 13/016,656, filed on Jan. 28, 2011, granted, now 8,124,531, issued on Feb. 28, 2012.
Application 13/016,656 is a continuation in part of application No. 12/833,823, filed on Jul. 9, 2010, granted, now 9,034,768, issued on May 19, 2015.
Application 13/016,656 is a continuation in part of application No. 12/535,464, filed on Aug. 4, 2009, granted, now 8,119,527, issued on Feb. 21, 2012.
Claims priority of provisional application 61/737,419, filed on Dec. 14, 2012.
Claims priority of provisional application 61/616,377, filed on Mar. 27, 2012.
Prior Publication US 2023/0041794 A1, Feb. 9, 2023
Int. Cl. H01L 21/768 (2006.01); C23C 16/04 (2006.01); C23C 16/06 (2006.01); H01L 21/285 (2006.01); H01L 21/321 (2006.01); H10B 12/00 (2023.01)
CPC H01L 21/76879 (2013.01) [C23C 16/04 (2013.01); C23C 16/045 (2013.01); C23C 16/06 (2013.01); H01L 21/28556 (2013.01); H01L 21/321 (2013.01); H01L 21/76898 (2013.01); H10B 12/488 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A method comprising:
providing a substrate having a surface and including a structure having one or more features, the one or more features each having a feature opening surrounded by a field region and an interior accessible through the opening, wherein the one or more features each comprise a metal-containing surface that extends from the field region to the feature interior; and
treating the one or more features, wherein treating the one or more features comprises exposure to nitrogen trifluoride (NF3) and wherein a concentration of NF3 is greater inside the feature near the feature opening than deeper within the feature interior.