US 12,444,644 B2
Lift pin assembly
Yogananda Sarode Vishwanath, Bangalore (IN); and Anand Kumar, Bangalore (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 19, 2024, as Appl. No. 18/640,411.
Application 17/227,066 is a division of application No. 16/010,250, filed on Jun. 15, 2018, granted, now 11,004,722, issued on May 11, 2021.
Application 18/640,411 is a continuation of application No. 17/227,066, filed on Apr. 9, 2021, granted, now 12,002,703.
Prior Publication US 2024/0266206 A1, Aug. 8, 2024
Int. Cl. H01L 21/687 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68742 (2013.01) [C23C 16/4401 (2013.01); H01J 37/32715 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); H01J 37/32449 (2013.01); H01L 21/67069 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A lift pin assembly comprising:
a lift pin guide;
a purge cylinder disposed adjacent the lift pin guide, the lift pin guide and the purge cylinder having a passage formed therethrough that is configured to receive a lift pin suitable for lifting a substrate, wherein the purge cylinder comprises:
a plurality of nozzles configured to direct a flow of gas radially inward into a portion of the passage disposed in the purge cylinder that receives the lift pin, wherein each nozzle included in the plurality of nozzles has an outer diameter of about 20 mil to about 80 mil; and
a bushing, wherein the purge cylinder is disposed between the lift pin guide and the bushing.