US 12,444,643 B2
Method and apparatus for positioning optical isolator assembly with replaceable motor assembly
Yaojun Xu, San Jose, CA (US); and Rudy F. Garcia, Union City, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Oct. 7, 2022, as Appl. No. 17/938,875.
Claims priority of provisional application 63/256,668, filed on Oct. 18, 2021.
Prior Publication US 2023/0122832 A1, Apr. 20, 2023
Int. Cl. H01L 21/687 (2006.01); B23K 3/08 (2006.01)
CPC H01L 21/68742 (2013.01) [B23K 3/08 (2013.01); H01L 21/68785 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an optical component;
an ultra-high vacuum chamber of an enclosure;
a lifting device disposed in a lifting device housing, the lifting device being configured to adjust a vertical position of the optical component at a first connection; and
a motor assembly disposed in a motor housing, the motor assembly being configured to drive the lifting device to adjust the vertical position of the optical component;
wherein the motor housing is detachably connected to the lifting device housing, the motor assembly is detachably coupled to the lifting device, and the lifting device housing, the motor housing, and the optical component are disposed in the ultra-high vacuum chamber of the enclosure.