US 12,444,634 B2
Device and method for imaging an object in at least two views
Andreas Birkner, Jena (DE); and Ralf Langenbach, Freudenberg (DE)
Assigned to INTEGRATED DYNAMICS ENGINEERING GMBH, Raunheim (DE)
Appl. No. 18/032,665
Filed by Integrated Dynamics Engineering GMBH, Raunheim (DE)
PCT Filed Oct. 19, 2021, PCT No. PCT/EP2021/078862
§ 371(c)(1), (2) Date Apr. 19, 2023,
PCT Pub. No. WO2022/084271, PCT Pub. Date Apr. 28, 2022.
Claims priority of application No. 10 2020 127 580.3 (DE), filed on Oct. 20, 2020.
Prior Publication US 2023/0395417 A1, Dec. 7, 2023
Int. Cl. H01L 21/68 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/681 (2013.01) [H01L 21/67259 (2013.01); H01L 21/68707 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A device for simultaneously imaging an object in at least two different views, comprising
at least one imaging optical element; and
at least one reflective element;
wherein the reflective element is at least partly arranged within an object space of the imaging optical element, wherein an optical axis of the imaging optical element is associated with a first view of the object; and
wherein the reflective element is operable to image a second view of the object, which is different from the first view.