US 12,444,627 B2
Method for transferring objects and transfer apparatus using the same
Tsan-Hsiung Lai, Hsinchu (TW); Guang-Chen Chen, Hsinchu (TW); Yang-Chieh Chen, Hsinchu (TW); Wei-Liang Chou, Hsinchu (TW); and Ping-Lung Wang, Hsinchu (TW)
Assigned to YOUNGTEK ELECTRONICS CORPORATION, Hsinchu (TW)
Filed by YOUNGTEK ELECTRONICS CORPORATION, Hsinchu (TW)
Filed on Jul. 18, 2022, as Appl. No. 17/813,056.
Claims priority of provisional application 63/315,598, filed on Mar. 2, 2022.
Claims priority of application No. 202110826938.9 (CN), filed on Jul. 21, 2021.
Prior Publication US 2023/0026488 A1, Jan. 26, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/67259 (2013.01) [H01L 21/681 (2013.01); H01L 21/6835 (2013.01); H01L 2221/68363 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method for transferring objects, adapted for transferring at least one object on a first substrate to a second substrate by an ejector, comprising:
controlling, during a first period, the ejector at an ejecting working position to perform an ejecting process along with a first direction, to apply a first acting force to the first substrate toward the second substrate, thereby transferring the object from the first substrate to the second substrate;
controlling, during a second period, the ejector to move to an ejecting standby position along with a second direction, which is non-parallel to the first direction, to expose the object on the first substrate to a detection range of an image capturing device, wherein a relative displacement between the ejector and the image capturing device is generated during the second period;
detecting the position of the object in the detection range by the image capturing device to obtain calibration information; and
adjusting the position of the first substrate according to the calibration information.