| CPC H01L 21/67092 (2013.01) [B24D 5/165 (2013.01); B24D 7/16 (2013.01); B26D 1/0006 (2013.01); B26D 3/06 (2013.01); B24B 41/053 (2013.01); B26D 2001/002 (2013.01)] | 4 Claims |
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1. A blade dicing device for wafers, the device comprising:
a body (20);
a cutting blade (30) protruding from an outer periphery of the body (20); and
grit (31) bonded and attached to an outer periphery of the cutting blade (30) and configured to cut a wafer,
wherein a length of the grit (31) is 2 μm to 4 μm,
a key protrusion (15) is provided on a rotary shaft (10) for the body (20) and the cutting blade (30) to rotate together with the rotary shaft (10), and key grooves (25 and 35) into which the key protrusion (15) is inserted are formed on the body (20) and the cutting blade (30), respectively,
the body (20) includes a pair of bodies comprising a first body (21) and a second body (22), the first body (21) is integrally connected to the rotary shaft (10) or fixedly connected to the rotary shaft (10), and the second body (22) is tightened to a tightening member (40) that is screw-connected to the rotary shaft (10), thereby applying pressure to and fixing the cutting blade (30) interposed between the pair of bodies (20),
a plurality of fixing holes (36) are formed in the cutting blade (30), while fixing protrusions (26) that are inserted into the fixing holes (36) are provided in the first body (21), wherein a protrusion length (L) of each of the fixing protrusions (26) is smaller than a thickness (T) of the cutting blade (30), and the each of the fixing protrusions (26) has a structure in which an outer diameter thereof gradually increases as going inward from an end, and an outer diameter of an inner end of the each of the fixing protrusions (26) is equal to or larger than an inner diameter of each of the fixing holes (36), so that when the second body (22) pushes the cutting blade (30) toward the first body (21), the fixing protrusions (26) are fitted into the fixing holes (36) in order to prevent micro-shaking of the cutting blade (30),
first fixing grooves (41) are formed on an outer surface of a tightening member (40) at a portion corresponding to a periphery of the rotary shaft (10), while second fixing grooves (12) are formed in a longitudinal direction on the rotary shaft (10), and a fixing member (50) fitted to the rotary shaft (10) is provided with a first protrusion (51) that is inserted into one of the first fixing grooves (41) and a second protrusion (52) that is inserted into one of the second fixing grooves (12) to prevent the tightening member (40) from rotating, thereby preventing loosening of the tightening member (40), and
a pressure ball (60) is provided on an inner wall of each of the first fixing grooves (41) so as to be able to move forward and backward, wherein the pressure ball (60) is supported by a spring (70) and receives force to move backward, and a receiving groove (43) of the tightening member (40) in which the pressure ball (60) is received has a structure that deepens as going forward, so that when the first protrusion (51) is inserted into the one of the first fixing grooves (41), the pressure ball (60) is pushed backward by the first protrusion (51), thereby allowing the first protrusion (51) to be inserted into the one of the first fixing grooves (41).
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