US 12,444,594 B2
Gas valves for ion guides
Henning Wehrs, Bremen (DE)
Assigned to Thermo Fisher Scientific (Bremen) GmbH, Bremen (DE)
Appl. No. 17/611,095
Filed by Thermo Fisher Scientific (Bremen) GmbH, Bremen (DE)
PCT Filed May 19, 2020, PCT No. PCT/EP2020/064007
§ 371(c)(1), (2) Date Nov. 12, 2021,
PCT Pub. No. WO2020/234320, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 1907171 (GB), filed on May 21, 2019.
Prior Publication US 2022/0230863 A1, Jul. 21, 2022
Int. Cl. H01J 49/06 (2006.01); F16K 1/20 (2006.01); H01J 49/00 (2006.01); H01J 49/02 (2006.01); H01J 49/10 (2006.01); H01J 49/42 (2006.01)
CPC H01J 49/063 (2013.01) [F16K 1/2007 (2013.01); H01J 49/005 (2013.01); H01J 49/0077 (2013.01); H01J 49/022 (2013.01); H01J 49/065 (2013.01); H01J 49/067 (2013.01); H01J 49/068 (2013.01); H01J 49/105 (2013.01); H01J 49/421 (2013.01); H01J 49/4215 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An ion optical arrangement for use in a mass spectrometer, comprising:
electrodes defining an ion optical path,
a housing for accommodating the electrodes, the housing including an entrance aperture for ions to enter, an exit aperture for ions to exit, and multiple through holes for gas to exit,
a voltage source for providing voltages to the electrodes to produce electric fields, and
a valve for allowing gas to leave the housing, wherein the valve comprises an electrostatic mechanism; and
wherein the electrostatic mechanism comprises a flexible foil arranged in a spacing between the housing and a support element, the electrostatic mechanism configured for covering the multiple through holes in the housing when a first voltage is applied to the flexible foil and being spaced apart from at least a portion of the multiple through holes to provide a flow path for gas to flow through the multiple through holes and out at least one edge of the flexible foil when a second voltage is applied to the flexible foil.