US 12,444,593 B2
Apparatus and method for high-performance charged particle detection
Hung Quang Hoang, Esch-sur-Alzette (LU); Tom Wirtz, Esch-sur-Alzette (LU); Rathaiah Pureti, Esch-sur-Alzette (LU); and Olivier Bouton, Esch-sur-Alzette (LU)
Assigned to LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette (LU)
Appl. No. 17/925,644
Filed by LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST), Esch-sur-Alzette (LU)
PCT Filed May 17, 2021, PCT No. PCT/EP2021/063007
§ 371(c)(1), (2) Date Nov. 16, 2022,
PCT Pub. No. WO2021/233833, PCT Pub. Date Nov. 25, 2021.
Claims priority of application No. LU101794 (LU), filed on May 18, 2020.
Prior Publication US 2023/0170205 A1, Jun. 1, 2023
Int. Cl. H01J 49/02 (2006.01)
CPC H01J 49/025 (2013.01) 20 Claims
OG exemplary drawing
 
1. A detection apparatus for detecting charged particles, the detection apparatus comprising;
a charged particle beam inlet;
a detection front comprising an entry face of at least one microchannel plate (MCP) assembly, wherein the entry face extends along a first direction, wherein the MCP assembly is configured for receiving, along a second direction perpendicular to said first direction, a plurality of beams of charged particles that impinge on the entry face and for generating, for each impinging the beam of charged particles, a corresponding amplified detection signal on an opposite exit face;
at least one read-out anode for collecting said amplified detection signals, the anode being arranged at a distance to, and in parallel with the exit face of said at least one MCP assembly,
a beam deflection means arranged downstream of said charged particle beam inlet at a distance from said entry face and configured for selectively deflecting incoming beams of the charged particles along said first direction, so that the corresponding the beams of charged particles selectively reach different portions of the entry face of the at least one MCP assembly along said first direction;
wherein the charged particle beam inlet, the beam deflection means, the detection front, and the at least one read-out anode extend along said second direction.