US 12,444,585 B2
Electrical connector for cooled substrate support assembly
Andrew Antoine Noujaim, Morgan Hill, CA (US); Álvaro García De Gorordo, Mountain View, CA (US); Andreas Schmid, Meyriez (CH); and Stephen Donald Prouty, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 29, 2020, as Appl. No. 16/887,596.
Prior Publication US 2021/0375599 A1, Dec. 2, 2021
Int. Cl. H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/32724 (2013.01) [H01L 21/67109 (2013.01); H01L 21/6833 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electrical connector, comprising:
a first interface body having first sockets; and
a second interface body having second sockets, the second interface body coupled to the first interface body and to a third interface body, the second interface body and first interface body circumscribed by the third interface body, wherein each of the first interface body and the second interface body are brazed or potted to the third interface body, and wherein each of the first interface body and the second interface body comprise:
a plurality of electrical terminals disposed in the first sockets and the second sockets, each electrical terminal disposed in the first sockets of the first interface body coupled to a respective one of the electrical terminals disposed in the second sockets of the second interface body to form a plurality of isolated conductive electrical unions, wherein a first opening of the first sockets are facing in a direction opposite and away from a second opening of the second sockets, wherein a centerline of at least one of the second sockets is parallel and offset from a centerline of, and electrically coupled to, a paired one of the first sockets, and wherein the second interface body includes a plurality of non-conductive protruding sidewalls that extend into the first interface body between each pair of the electrical terminals of the first interface body, and wherein the third interface body includes a seal groove formed in a bottom surface thereof that faces away from the first interface body.