	US 12,444,584 B2
	Ceramic susceptor
Ji-Sook Park, Anseong-si (KR)
Assigned to MiCo Ceramics Ltd., Anseong-si (KR)
Filed by MiCo Ceramics Ltd., Anseong-si (KR)
Filed on Dec. 13, 2024, as Appl. No. 18/979,735.
Claims priority of application No. 10-2023-0187841 (KR), filed on Dec. 21, 2023.
Prior Publication US 2025/0210323 A1, Jun. 26, 2025
Int. Cl. H01J 37/32 (2006.01); C04B 35/58 (2006.01); C04B 35/581 (2006.01)

CPC H01J 37/32715 (2013.01) [C04B 35/58007 (2013.01); C04B 35/581 (2013.01); H01J 37/32082 (2013.01); H01J 37/32577 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/3886 (2013.01)]

15 Claims

1. A susceptor comprising:

a ceramic plate with a radio-frequency electrode disposed therein; and

an electrode rod electrically connected to the radio-frequency electrode at one end and electrically connected to a power source at a remaining end to supply power to the radio-frequency electrode,

wherein the electrode rod comprises:

a base material of Mo, W, or an alloy thereof; and

a metal nitride film surrounding a surface of the base material,

wherein the one end of the electrode rod comprises an exposed surface of the base material that is not coated with the metal nitride film, and

wherein the metal nitride film comprises an AlCrN film.