US 12,444,573 B2
Impedance matching network and method
Michael Gilliam Ulrich, Delran, NJ (US)
Assigned to ASM America, Inc.
Filed by ASM America, Inc., Phoenix, AZ (US)
Filed on Apr. 18, 2022, as Appl. No. 17/722,598.
Application 17/722,598 is a continuation of application No. 16/778,181, filed on Jan. 31, 2020, granted, now 11,335,540.
Application 16/778,181 is a continuation in part of application No. 16/743,492, filed on Jan. 15, 2020, granted, now 11,150,283, issued on Oct. 19, 2021.
Application 16/743,492 is a continuation in part of application No. 16/735,088, filed on Jan. 6, 2020, granted, now 11,342,161.
Application 16/735,088 is a continuation in part of application No. 16/722,219, filed on Dec. 20, 2019, granted, now 11,342,160.
Application 16/722,219 is a continuation in part of application No. 16/673,220, filed on Nov. 4, 2019, abandoned.
Application 16/673,220 is a continuation in part of application No. 16/667,293, filed on Oct. 29, 2019, granted, now 11,081,316, issued on Aug. 3, 2021.
Application 16/667,293 is a continuation in part of application No. 16/654,788, filed on Oct. 16, 2019, granted, now 10,984,986, issued on Apr. 20, 2021.
Application 16/654,788 is a continuation in part of application No. 16/415,764, filed on May 17, 2019, granted, now 10,692,699, issued on Jun. 23, 2020.
Application 16/415,764 is a continuation in part of application No. 15/816,351, filed on Nov. 17, 2017, abandoned.
Application 15/816,351 is a continuation in part of application No. 15/450,495, filed on Mar. 6, 2017, granted, now 10,679,824, issued on Jun. 9, 2020.
Application 15/450,495 is a continuation in part of application No. 15/196,821, filed on Jun. 29, 2016, granted, now 10,699,880, issued on Jun. 30, 2020.
Claims priority of provisional application 62/185,998, filed on Jun. 29, 2015.
Claims priority of provisional application 62/303,625, filed on Mar. 4, 2016.
Claims priority of provisional application 62/424,162, filed on Nov. 18, 2016.
Claims priority of provisional application 62/751,851, filed on Oct. 29, 2018.
Claims priority of provisional application 62/753,959, filed on Nov. 1, 2018.
Claims priority of provisional application 62/767,717, filed on Nov. 15, 2018.
Claims priority of provisional application 62/754,768, filed on Nov. 2, 2018.
Claims priority of provisional application 62/784,590, filed on Dec. 24, 2018.
Claims priority of provisional application 62/788,269, filed on Jan. 4, 2019.
Claims priority of provisional application 62/796,146, filed on Jan. 24, 2019.
Claims priority of provisional application 62/812,032, filed on Feb. 28, 2019.
Claims priority of provisional application 62/812,053, filed on Feb. 28, 2019.
Prior Publication US 2022/0246401 A1, Aug. 4, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/32 (2006.01); C23C 16/50 (2006.01); C23C 16/52 (2006.01); H01L 21/66 (2006.01); H03H 7/40 (2006.01); H03H 11/30 (2006.01)
CPC H01J 37/32183 (2013.01) [C23C 16/50 (2013.01); C23C 16/52 (2013.01); H01L 22/26 (2013.01); H03H 7/40 (2013.01); H03H 11/30 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An impedance matching network comprising:
an RF input configured to operably couple to an RF source;
an RF output configured to operably couple to a plasma chamber; and
variable capacitors comprising:
a first variable capacitor, a terminal of the first variable capacitor being electrically connected to the RF input; and
a second variable capacitor separate and distinct from the first variable capacitor, a terminal of the second variable capacitor being electrically connected to the RF output;
wherein at least one of the variable capacitors is an electrically variable capacitor that comprises:
a plurality of capacitors operably coupled in parallel, the plurality of capacitors comprising:
fine capacitors increasing in capacitance; and
coarse capacitors having one or more capacitances, wherein each of the one or more capacitances of the coarse capacitors is greater than a greatest individual capacitance of the fine capacitors; and
a plurality of switches, wherein each switch of the plurality of switches is operably coupled with a corresponding capacitor of the plurality of capacitors to switch in or out the corresponding capacitor;
wherein each capacitor of the plurality of capacitors provides a change to a total capacitance of the electronically variable capacitor when the capacitor's corresponding switch switches in or out the capacitor;
wherein a capacitor position for the electronically variable capacitor for enabling an impedance match is determined by a processor using software, the capacitor position indicative of which of the fine capacitors and which of the coarse capacitors to have switched in; and
wherein an impedance match is enabled by directly switching the electronically variable capacitor to the determined capacitor position.