US 12,444,571 B2
Plasma source with a coolant leakage detection system
Ryan T. Downey, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 12, 2024, as Appl. No. 18/412,328.
Claims priority of provisional application 63/545,714, filed on Oct. 25, 2023.
Prior Publication US 2025/0232953 A1, Jul. 17, 2025
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/3211 (2013.01) [H01J 37/32853 (2013.01); H01J 37/32183 (2013.01); H01J 2237/002 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A plasma source for generating plasma comprising:
an RF generation system comprising one or more electrical components operable to generate a plasma in a plasma region; and
a cooling system comprising:
a coolant channel extending through the plasma source and configured to flow a coolant to cool the one or more electrical components;
a first flow control device coupled to the coolant channel to control a flow of the coolant into the coolant channel;
a second flow control device coupled to the coolant channel to control a flow of the coolant out of the coolant channel; and
a pressure measurement device coupled with the coolant channel to measure a pressure level of the coolant.